硅窗片
| 属性 | 规范参数 |
| 标准直径 (φmm) | 8.0, 10.0, 12.7, 15.0, 20.0, 25.4, 30.0 |
| 标准厚度 (mm) | 1.0 ～ 10.0 |
| 直径公差 (mm) | 0.0/-0.2 (general), 0.0/-0.1 (high precision) |
| 厚度公差 (mm) | ±0.2 (general), ±0.05 (high precision) |
| 通光孔径 | >75% (small size), >90% (large size) |
| 平行度 | 3 min. (general), 10 sec. (high precision) |
| 表面质量 | 80/50 (general), 40/20 (high precision) |
| 面型 (per 25mm@633nm) | λ(general), λ/4 (high precision) |
| 倒角 (face width x 45。) | <0.25mm |
| 镀膜 | uncoated, ar, hr, pr, coating, etc. |
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